The SXES is a powerful high energy resolution spectrometer for light element analysis. It is designed for use with the microprobe as part of an integrated analytical system or stand-alone detector. Use of the SXES enables low voltage analysis at <1kV, spectral mapping with high energy resolution, fast parallel detection, and chemical state analysis.
Energy resolution: | 0.3eV at the Fermi Edge of Al-L of AI metal |
Energy range: | JS50XL 50-170eV (approx, 700eV with high order X-rays) |
Energy range: | JS200N 70-210eV (approx, 800eV with high order X-rays) |
Applicable instruments: | JXA-8530F, JXA-8230, JXA-8500F, JXA-8100, JXA-8200, JSM-7xxx series |
CCD camera operation: | Software for CCD operation |
Data converter: | Data conversion to EPMA data format for data processing by EPMA Viewer |
Calibration for spectrometer: | Energy calibration for spectrometer |
XES Mapping: | Spectrum mapping of XES (Map, line and point analysis mode) |
XES Reconstructor: | Reconstruct the map for other ROI form stored spectrum map |
Calibration curve (Option): | Trace element analysis for light elements |
EPMA data viewer: | This software is dedicated to data display |
SXES | WDX | EDX | |
---|---|---|---|
Resolution | 0,3 eV | 8 eV | 129 eV |
Chemical-State Analysis | Possible | Possible | Impossible |
Parallel detection | Possible | Impossible | Possible |
Detection device | Grating | Crystal | SDD, SiLi, |
Cooling system | Peltier | Not needed | Peltier |
Sensitivity | 20 ppm (@B) | 100 ppm (@B) | 0,1 % (@B) |
Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.